Ticker : 300236.SZ
CN
Damascene
Product Applications
  • • Damascene Copper Interconnect Electroplating
  • • Products cover all copper interconnect electroplating processes above 14nm
  • • Supporting Equipment: LAM and AMAT
Product Characteristics
  • • Boasts excellent bottom-up filling capability, enabling efficient, void-free filling of deep holes and high-aspect-ratio structures.
  • • Achieves defect-free, high-quality filling across various critical dimensions (CD), adapting to diverse process requirements.
  • • The product adheres to green and environmental protection principles, reducing the use and emission of hazardous substances and contributing to sustainable development.